Gas Liquid Contactor for Ozonation 

The ozonation gas/liquid contactor is designed to transfer ozone into liquids without forming bubbles.  It may also be used to dissolve or remove ammonia, hydrogen chloride or other chemically agressive gases.  Designed specifically for microelectronics manufacturing applications, this gas/liquid contactor may be used in critical cleaning and surface passivation applications. 

The membrane module features CMS' non-porous highly fluorinated polymer membrane supported on expanded PTFE.  The liquid is in contact with the non-porous membrane while the porous support is in contact with the gas. Gases diffuse readily across the membrane but liquids do not and cannot enter into the pores.  This enables consistently high gas transport rates to be achieved. 

The membrane module is entirely constructed of highly fluorinated polymers, providing excellent chemical resistance to a wide range of chemicals.  It does not contain any elastomeric materials.  It is also designed to meet the requirements ultraclean processes.

Click here  for more general information on membrane gas/liquid contactors.

Click here to learn more about CMS gas/liquid contactors.